journal article·2022-12

Structural transformation of C+ implanted diamond and lift-off process

Xiaohua Zhu, Siyi Chan, Xiaolu Yuan, Juping Tu, Siwu Shao, Yuwei Jia, Liangxian Chen, Junjun Wei, Jinlong Liu, Hiroshi Kawarada, Chengming Li

Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Advanced Surface Polishing Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (26)

Show source-provided references
1. Synthesis of large single crystal diamond plates by high rate homoepitaxial growth using microwave plasma CVD and lift-off process10.1016/j.diamond.2007.12.058 ↗
2. Single-crystal diamond plate liftoff achieved by ion implantation and subsequent annealing10.1063/1.107981 ↗
3. Lift-off technique of homoepitaxial CVD diamond films by deep implantation and selective etching
4. Electrochemical patterning of amorphous carbon on diamond10.1149/1.2221093 ↗
5. Improvements of crystallinity of single crystal diamond plates produced by lift-off process using ion implantation10.1016/j.diamond.2009.09.006 ↗
6. A nitrogen doped low-dislocation density free-standing single crystal diamond plate fabricated by a lift-off process10.1063/1.4885552 ↗
7. Uniform growth and repeatable fabrication of inch-sized wafers of a single-crystal diamond10.1016/j.diamond.2012.12.012 ↗
8. Crystallinity of freestanding large undoped single crystal diamond plates produced using pre-ion-implanted substrates and lift-off processes10.1016/j.diamond.2010.06.006 ↗
9. Raman investigation of damage caused by deep ion implantation in diamond10.1103/PhysRevB.62.5461 ↗
10. Cross-sectional transmission electron microscopy method and studies of implant damage in single crystal diamond10.1116/1.2209659 ↗
11. Characterization of three-dimensional microstructures in single-crystal diamond10.1016/j.diamond.2006.01.018 ↗
12. Ion-implantation-induced defects in diamond and their annealing: experiment and simulation10.1002/(SICI)1521-396X(199907)174:1<83::AID-PSSA83>3.0.CO;2-3 ↗
13. Damage accumulation in diamond during ion implantation10.1557/jmr.2015.21 ↗
14. Pressure and temperature dependence of the first-order Raman mode of diamond10.1063/1.346375 ↗
15. Homo-epitaxial diamond film growth on ion implanted diamond substrates10.1016/0925-9635(95)00423-8 ↗
16. Investigation of carbon near the graphite-diamond-liquid triple point10.1103/PhysRevLett.69.2991 ↗
17. The effect of ion-beam induced strain on the nucleation density of chemical vapour deposited diamond
18. Mechanism for the amorphisation of diamond10.1002/adma.201104511 ↗
19. Mechanism of graphitization and optical degradation of CVD diamond films by rapid heating treatment10.1016/j.diamond.2016.11.010 ↗
20. Radiation defects and their annealing behaviour in ion-implanted diamonds10.1016/S0168-583X(99)01190-8 ↗
21. Zaitsev · 2001
22. The raman spectrum of amorphous diamond
23. EELS analysis of vacuum arc-deposited diamond-like films10.1080/09500838808214715 ↗
24. Band gap of essentially fourfold-coordinated amorphous diamond synthesized from C60 fullerene10.1103/PhysRevB.60.6357 ↗
25. Structural transformation of implanted diamond layers during high temperature annealing10.1016/j.nimb.2015.07.020 ↗
26. Evolution of growth characteristics around the junction in the mosaic diamond10.1016/j.diamond.2021.108640 ↗