Diamond microwave micro relay
Source abstract
Abstract
Abstract Based on the technology of the electrostatically actuated cantilever micro switch, entirely made of diamond on a Si-baseplate (except for the final top interconnect metal level) [reported previously] and based on the static and dynamic switching characteristics [reported previously], in coplanar arrangement was designed, fabricated and successfully operated. Due to the DC-coupling the new MEMS-relay allows switching of bias and signal simultaneously.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Semiconductor Lasers and Optical Devices · Photonic and Optical Devices · Advanced MEMS and NEMS Technologies
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References (6)
Show source-provided references
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