Quality of diamond wafers grown by microwave plasma CVD: effects of gas flow rate
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (15)
Show source-provided references
1. W. Zhu, R. Messier, A.R. Badzian, in: J.P. Desmukes, A.J. Purdes, B.S. Meyerson, T.D. Moustakas, K.E. Spear, K.V. Ravi, M. Yoder (Eds.), Proc. of the 1st Int. Symp. on Diamond and Diamond-Like Films, Electrochemical Soc., New York, vol. 89–12, 1989, pp. 61.
2. Celii · J. Appl. Phys. · 1991 · 70 · 563610.1063/1.350179 ↗
3. Celii · Thin Solid Films · 1992 · 212 · 14010.1016/0040-6090(92)90512-A ↗
4. Ralchenko · Diamond Relat. Mater. · 1997 · 6 · 41710.1016/S0925-9635(96)00619-X ↗
5. Graebner · Diamond Films Technol. · 1993 · 3 · 77
6. V.G. Ralchenko, A.V. Vlasov, I.I. Vlasov, B.V. Zubov, A. Nikitin, A.V. Khomich, in: Lasers in Synthesis, Characterization and Processing of Diamond, SPIE vol. 3484, 1998.10.1117/12.328209 ↗
7. Wild · Diamond Relat. Mater. · 1993 · 2 · 15810.1016/0925-9635(93)90047-6 ↗
8. Graebner · Diamond Relat. Mater. · 1996 · 5 · 69310.1016/0925-9635(95)00370-3 ↗
9. Yu.A. Mankelevich, N.V. Suetin, unpublished results.
10. M.A. Prelas, G. Popovici, L.K. Bigelow (Eds.), Handbook of Industrial Diamonds and Diamond Films, Marcel Dekker, New York, chaps. 13–18, 1997.
11. Bergmaier · Diamond Relat. Mater. · 1996 · 5 · 99510.1016/0925-9635(95)00345-2 ↗
12. Khomich · J. CVD · 1997 · 5 · 361
13. Wort · Diamond Relat. Mater. · 1994 · 3 · 115810.1016/0925-9635(94)90162-7 ↗
14. Mankelevich · J. CVD · 1996 · 5 · 74
15. V.V. Parshin, V.G. Ralchenko, V.I. Konov, in: Proc. 23rd Conf IR and MM Waves, Colchester, 1998, p. 232.