A rectilinear plasma filtering system for vacuum-arc deposition of diamond-like carbon coatings

I.I. Aksenov; V.A. Belous; V.V. Vasil'ev; Yu.Ya. Volkov; V.E. Strel'nitskij

doi:10.1016/s0925-9635(98)00402-6

journal article·1999-03

A rectilinear plasma filtering system for vacuum-arc deposition of diamond-like carbon coatings

I.I. Aksenov, V.A. Belous, V.V. Vasil'ev, Yu.Ya. Volkov, V.E. Strel'nitskij

Diamond and Related Materials· Volume 8· Issue 2-5

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Materials processing

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Vacuum and Plasma Arcs

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References (11)

Show source-provided references

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7. S. Falabela, D.M. Sanders, US Patent 5 279 723, January 1994.

8. D.M. Sanders, S. Falabela, US Patent 5 282 944, February 1994.

9. Xu · J. Appl. Phys. · 1996 · 79 · 723410.1063/1.361440 ↗

10. Schulke · IEEE Trans. Plasma Sci. · 1997 · 25 · 66010.1109/27.640681 ↗

11. I.I. Aksenov, V.A. Belous, V.G. Padalka, V.M. Khoroshikh, US Patent 4 551 221, November 1985.