Deposition of carbon nitride via hot filament assisted CVD and pulsed laser deposition
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Abstract
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices
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References (16)
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1. Liu · Science · 1989 · 245 · 84110.1126/science.245.4920.841 ↗
2. Liu · Phys. Rev. B · 1990 · 41 · 1072710.1103/PhysRevB.41.10727 ↗
3. Torng · J. Mater. Res. · 1990 · 5 · 249010.1557/JMR.1990.2490 ↗
4. Li · J. Appl. Phys. · 1993 · 74 · 21910.1063/1.355304 ↗
5. Marton · Phys. Rev. Lett. · 1994 · 73 · 11810.1103/PhysRevLett.73.118 ↗
6. Yong · J. Mater. Res. · 1995 · 10 · 4110.1557/JMR.1995.0041 ↗
7. Liu · Science · 1993 · 261 · 33410.1126/science.261.5119.334 ↗
8. Yu · Phys. Rev. B · 1994 · 49 · 503410.1103/PhysRevB.49.5034 ↗
9. Yen · Appl. Phys. Lett. · 1995 · 67 · 280110.1063/1.114789 ↗
10. Zhang · Appl. Phys. Lett. · 1996 · 68 · 63410.1063/1.116492 ↗
11. Li · Appl. Phys. Lett. · 1995 · 67 · 20310.1063/1.114667 ↗
12. Teter · Science · 1996 · 271 · 5310.1126/science.271.5245.53 ↗
13. 1994
14. Y. Cheng, L.P. Guo, E.G. Wang, J. Cryst. Growth, in press.
15. T. Wernighaus, D.R.T. Zhan, E.G. Wang, Y. Chen, Diamond Relat. Mater., accepted.
16. Chen · J. Phys. Condens. Matter · 1996 · 8 · L68510.1088/0953-8984/8/45/005 ↗