journal article·1997-12

Deposition of carbon nitride via hot filament assisted CVD and pulsed laser deposition

D.J. Johnson, Yan Chen, Yue He, R.H. Prince

Diamond and Related Materials· Volume 6· Issue 12
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Abstract

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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices

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References (16)

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