journal article·1997-04

Improvement of diamond nuclei orientation by double-step bias treatment in microwave plasma-assisted chemical vapor deposition using C2H4 and CH4 as carbon source

Takeyasu Saito, Shigenori Tsuruga, Hideaki Maeda, Katsuki Kusakabe, Shigeharu Morooka

Diamond and Related Materials· Volume 6· Issue 5-7
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Abstract

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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices

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