journal article·1999-12

Effect of annealing on SiC thin films prepared by pulsed laser deposition

Jipo Huang, Lianwei Wang, Jun Wen, Yuxia Wang, Chenglu Lin, Mikael Östling

Diamond and Related Materials· Volume 8· Issue 12
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Abstract

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Research context

OpenAlex topics: Silicon Carbide Semiconductor Technologies · Thin-Film Transistor Technologies · Diamond and Carbon-based Materials Research

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