DataVXDiamond and Related MaterialsPaper
journal article·1992-03

Diamond-like films deposition by magnetron sputtering with additional ionization

R.K. Chuzhko, B.A. Rychkov, A.V. Klepikov, A.V. Popov

Diamond and Related Materials· Volume 1· Issue 2-4
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Abstract

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Research context

Materials processing

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Electrohydrodynamics and Fluid Dynamics

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References (2)

Show source-provided references
1. Diamondlike amorphous carbon films prepared by magnetron sputtering of graphite10.1116/1.572887 ↗
2. Evaluation onsp2/sp3 ratio in amorphous carbon structure by XPS and XAES10.1016/0169-4332(91)90098-5 ↗