D.C. cathodic arc deposition of diamond-like carbon and effects of R.F. charge compensation
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Abstract
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices
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References (6)
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1. Anttila · Thin Solid Films · 1986 · 136 · 12910.1016/0040-6090(86)90115-X ↗
2. Rother · Surf. Coat. Technol. · 1991 · 46 · 36110.1016/0257-8972(91)90177-X ↗
3. Rother · Thin Solid Films · 1990 · 188 · 29310.1016/0040-6090(90)90291-K ↗
4. Rother · J. Mater. Res. · 1991 · 6 · 10110.1557/JMR.1991.0101 ↗
5. Rother · Mater. Sci. Eng. A · 1991 · 40 · 781
6. S. Zinnow, B. Jüttner and B. Rother, unpublished work, 1989.