Formation of cubic boron nitride thin films by reactive cathodic arc evaporation
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Abstract
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Ion-surface interactions and analysis · Metal and Thin Film Mechanics
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References (13)
Show source-provided references
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8. Hahn · Diamond. Relat. Mater. · 1996 · 5 · 110310.1016/0925-9635(95)00507-2 ↗
9. Mirkarimi · J. Mater. Res. · 1994 · 9 · 292510.1557/JMR.1994.2925 ↗
10. F. Richter, G. Krannich, N. Kahl, R. Pintaske and S. Peter, publication in preparation.
11. Hackenberger · J. Vac. Sci. Technol. A · 1994 · 12 · 156910.1116/1.579357 ↗
12. Hofsäss · 1996
13. J. Hahn and M. Röder, unpublished work.