Dynamic fatigue of silicon
Source abstract
Abstract
Dynamic fatigue of silicon is a fairly recent area of materials research, having been detected for the first time in 1992. Within the past year, there have been several reports on silicon fatigue behavior describing novel phenomena and models for their origin. The findings include: an increase in high-cycle fatigue lifetime with a decrease in peak stress, the dependence of fatigue on the cyclic stress levels but not on the frequency of the cycle, and morphological changes in the surface silica during fatigue. Of the mechanisms proposed, the most likely candidate is one that involves mechanically induced damage in the silicon as a result of cyclic stresses.
Source: expertdata · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced Surface Polishing Techniques · Silicon and Solar Cell Technologies · Advanced MEMS and NEMS Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (34)
Show source-provided references
1. Slow crack growth in single-crystal silicon10.1126/science.256.5063.1537 ↗
2. A molecular mechanism for stress corrosion in vitreous silica10.1111/j.1151-2916.1983.tb15715.x ↗
3. Influence of nanometre-sized notch and water on the fracture behaviour of single crystal silicon microelements10.1046/j.1460-2695.2000.00354.x ↗
4. Fracture and fatigue behavior of single crystal silicon microelements and nanoscopic AFM damage evaluation10.1007/s005420050137 ↗
5. Fatigue studies of nanoscale structures for MEMS/NEMS applications using nanoindentation techniques10.1016/S0257-8972(02)00662-X ↗
6. Tensile-mode fatigue testing of silicon films as structural materials for MEMS10.1016/S0924-4247(01)00623-9 ↗
7. Fatigue of polycrystalline silicon under long-term cyclic loading10.1016/S0924-4247(02)00328-X ↗
8. Fatigue of materials used in microelectromechanical systems (MEMS)
9. Fracture toughness and fatigue investigations of polycrystalline silicon
10. Fatigue test of single crystal silicon resonator
11. Surface oxide effects on static fatigue of polysilicon MEMS
12. Fatigue failure in polysilicon not due to simple stress corrosion cracking10.1126/science.298.5596.1215 ↗
13. Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens10.1098/rspa.1999.0478 ↗
14. Fracture and fatigue of polysilicon MEMS devices
15. High-cycle fatigue of single-crystal silicon thin films10.1109/84.967383 ↗
16. Interfacial effects on the premature failure of polycrystalline silicon structural films
17. A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading10.1016/S1359-6454(02)00158-1 ↗
18. Mechanism of fatigue in micron-scale films of polycrystalline silicon for microelectromechanical systems10.1063/1.1455142 ↗
19. High-cycle fatigue and durability of polycrystalline silicon thin films in ambient air10.1016/S0924-4247(01)00709-9 ↗
20. High-cycle fatigue of polycrystalline silicon thin films in laboratory air
21. Materials reliability in MEMS devices
22. Subcritical crack growth in silicon MEMS10.1109/84.788636 ↗
23. Fatigue damage evolution in silicon films for micromechanical applications10.1007/BF02410527 ↗
24. Surface topography evolution and fatigue fracture in polysilicon MEMS structures10.1109/JMEMS.2003.809957 ↗
25. Surface topography and fatigue in silicon MEMS structures
26. On the evolution of surface morphology of polysilicon MEMS structures during fatigue
27. Reliability of polysilicon microstructures: in situ test benches10.1016/S0026-2714(02)00233-0 ↗
28. Influence of the step covering on fatigue phenomenon for polycrystalline silicon micro-electro-mechanical-systems (MEMS)10.1143/JJAP.41.L1339 ↗
29. Fracture strength and fatigue of polysilicon determined by a novel thermal actuator10.1109/16.848302 ↗
30. Ghandi · 1983
31. Stress-dependent surface reactions and implications for a stress measurement technique10.1063/1.371999 ↗
32. Mechanics and micromechanisms of fatigue crack growth in brittle solids10.1007/BF00018612 ↗
33. The effect of humidity on the reliability of a surface micromachined microengine
34. Crack propagation in ceramics under cyclic loads10.1007/BF01233107 ↗