Inorganic sensors utilizing MEMS and microelectronic technologies
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OpenAlex topics: Mechanical and Optical Resonators · Analytical Chemistry and Sensors · Gas Sensing Nanomaterials and Sensors
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References (38)
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1. Kinetically-controlled chemical sensing using micromachined structures10.1021/ar970071b ↗
2. Gas sensing based on the dynamic nonlinear responses of a semiconductor gas sensor: dependence on the range and frequency of a cyclic temperature change10.1016/S0003-2670(98)00013-0 ↗
3. A comparative study of signal processing techniques for clustering microsensor data (a first step towards an artificial nose)10.1016/S0925-4005(97)80283-3 ↗
4. Micro-hotplate gas sensor
5. Thermal modeling and characterization of micropower chemoresistive silicon sensors10.1016/S0925-4005(97)00261-X ↗
6. In situ conductivity characterization of oxide thin film growth phenomena on microhotplates10.1116/1.580959 ↗
7. Surface-ruthenated tin oxide as a novel hydrocarbon sensor10.1016/S0924-4247(97)01688-9 ↗
8. Characterisation of the catalyst-semiconductor interaction mechanism in metal-oxide gas sensors10.1016/S0925-4005(97)00150-0 ↗
9. A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons10.1016/S0925-4005(97)00171-8 ↗
10. Fabrication of a micro catalytic gas sensor using thin film process and Si anisotropic etching techniques10.1016/S0925-4005(97)00322-5 ↗
11. Recent developments in semiconducting thin-film gas sensors10.1016/0925-4005(94)01278-P ↗
12. Thin-film gas sensors based on semiconducting metal-oxides10.1016/0925-4005(94)01266-K ↗
13. Fast gas sensors based on metal oxides which are stable at high temperatures10.1016/S0925-4005(97)00114-7 ↗
14. A selective H2 sensor implemented using Ga2O3 thin-films which are covered with a gas-filtering SiO2 layer10.1016/S0925-4005(97)80085-8 ↗
15. A study of surface modification at semiconducting Ga2O3 thin film sensors for enhancement of the sensitivity and selectivity10.1016/S0925-4005(97)80084-6 ↗
16. Electrochemically micromachined cantilever beams tailored for enhanced sensor performance
17. Microcantilever sensors10.1080/108939597200214 ↗
18. Vapor detection using resonant microcantilevers10.1021/ac00099a006 ↗
19. Detection of mercury vapor using resonant microcantilevers10.1063/1.113896 ↗
20. Sequential position readout from arrays of micromechanical cantilever sensors10.1063/1.120749 ↗
21. Recent developments in field-effect sensors10.1016/0925-4005(94)01280-U ↗
22. Approaches and mechanisms to solid state based sensing10.1016/S0925-4005(96)02006-0 ↗
23. Distributed chemical sensing10.1016/S0925-4005(97)00272-4 ↗
24. Influence of mass transfer on the steady-state response of catalytic-metal-gate gas sensors10.1016/S0925-4005(97)80251-1 ↗
25. Enhanced selectivity of MOSFET gas sensors by systematical analysis of transient parameters10.1016/S0003-2670(97)87788-4 ↗
26. Influence of mass transfer on the steady state response of catalytic-metal-gate gas sensors10.1016/S0925-4005(97)80251-1 ↗
27. Response of metal-oxide-silicon carbide sensors to simulated and real exhaust gases10.1016/S0925-4005(97)00198-6 ↗
28. Influence of carbon monoxide, water and oxygen on high temperature catalytic metal-oxide-silicon carbide structures10.1016/S0925-4005(97)00292-X ↗
29. The influence of CO on the response of hydrogen sensitive Pd-MOS devices10.1016/S0925-4005(97)80338-3 ↗
30. Optimization and performance of high-resolution micro- optomechanical thermal sensors10.1016/S0924-4247(96)01401-X ↗
31. Photothermal measurements at picowatt resolution using uncooled micro-optomechanical sensors10.1063/1.120440 ↗
32. Two-dimensional micromechanical bimorph arrays for detection of thermal radiation10.1063/1.119147 ↗
33. Thermal analysis using a micromechanical calorimeter10.1063/1.118111 ↗
34. Sensor nanofabrication, performance, and conduction mechanisms in scanning thermal microscopy10.1116/1.589319 ↗
35. Micromechanical radiation dosimeter10.1063/1.113647 ↗
36. Active microlevers as miniature torque magnetometers10.1063/1.362550 ↗
37. High sensitivity measurement of magnetic fields using microcantilevers10.1063/1.119381 ↗
38. Magnetic force microscopy of thin film media for high density magnetic recording10.1016/S0304-8853(97)01010-X ↗