journal article·2017-04Open access

3D Tunable, Multiscale, and Multistable Vibrational Micro‐Platforms Assembled by Compressive Buckling

Xin Ning, Heling Wang, Xinge Yu, Julio A. N. T. Soares, Zheng Yan, Kewang Nan, Gabriel Velarde, Yeguang Xue, Rujie Sun, Qiyi Dong, Haiwen Luan, Chan Mi Lee, Aditya Chempakasseril, Mengdi Han, Yiqi Wang, Luming Li, Yonggang Huang, Yihui Zhang, John A. Rogers

Advanced Functional Materials· Volume 27· Issue 14

Abstract

Microelectromechanical systems remain an area of significant interest in fundamental and applied research due to their wide ranging applications. Most device designs, however, are largely 2D and constrained to only a few simple geometries. Achieving tunable resonant frequencies or broad operational bandwidths requires complex components and/or fabrication processes. The work presented here reports unusual classes of 3D micromechanical systems in the form of vibratory platforms assembled by controlled compressive buckling. Such 3D structures can be fabricated across a broad range of length scales and from various materials, including soft polymers, monocrystalline silicon, and their composites, resulting in a wide scope of achievable resonant frequencies and mechanical behaviors. Platforms designed with multistable mechanical responses and vibrationally decoupled constituent elements offer improved bandwidth and frequency tunability. Furthermore, the resonant frequencies can be controlled through deformations of an underlying elastomeric substrate. Systematic experimental and computational studies include structures with diverse geometries, ranging from tables, cages, rings, ring‐crosses, ring‐disks, two‐floor ribbons, flowers, umbrellas, triple‐cantilever platforms, and asymmetric circular helices, to multilayer constructions. These ideas form the foundations for engineering designs that complement those supported by conventional, micro‐electromechanical systems, with capabilities that could be useful in systems for biosensing, energy harvesting, and others.
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Research context

OpenAlex topics: Mechanical and Optical Resonators · Advanced MEMS and NEMS Technologies · Advanced Materials and Mechanics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Materials Science and Engineering Frederick Seitz Materials Research Laboratory University of Illinois at Urbana‐Champaign Urbana IL 61801 USA

Department of Civil and Environmental Engineering, and Department of Mechanical Engineering Northwestern University Evanston IL 60208 USA

Advanced Composites Centre for Innovation and Science University of Bristol Bristol BS8 1TR UK

Department of Industrial and Enterprise Systems Engineering University of Illinois at Urbana‐Champaign Urbana IL 61801 USA

Department of Chemistry University of Illinois at Urbana‐Champaign Urbana IL 61801 USA

Department of Chemical and Biomolecular Engineering University of Illinois at Urbana‐Champaign Urbana IL 61801 USA

National Key Laboratory of Science and Technology on Micro/Nano Fabrication Peking University Beijing 100871 P. R. China

Department of Aeronautics and Astronautics Engineering School of Aerospace Engineering Man‐machine‐Environment Engineering Institute Tsinghua University Beijing 100084 P. R. China

Department of Engineering Mechanics Center for Mechanics and Materials AML Tsinghua University Beijing 100084 P. R. China

Department of Materials Science and Engineering Department of Biomedical Engineering Department of Neurological Surgery Department of Chemistry Department of Mechanical Engineering Department of Electrical Engineering, and Department of Computer Science Simpson Querrey Institute, Feinberg Medical School Center for Bio‐Integrated Electronics Northwestern University Evanston IL 60208 USA

Funding

National Science Foundation · National Institutes of Health · National Natural Science Foundation of China

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