DataVXAdvanced Functional MaterialsPaper
journal article·2017-05Open access

Sputtered Titanium Carbide Thick Film for High Areal Energy on Chip Carbon‐Based Micro‐Supercapacitors

Manon Létiche, Kevin Brousse, Arnaud Demortière, Peihua Huang, Barbara Daffos, Sébastien Pinaud, Marc Respaud, Bruno Chaudret, Pascal Roussel, Lionel Buchaillot, Pierre Louis Taberna, Patrice Simon, Christophe Lethien

Advanced Functional Materials· Volume 27· Issue 20
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Source abstract

Abstract

The areal energy density of on‐chip micro‐supercapacitors should be improved in order to obtain autonomous smart miniaturized sensors. To reach this goal, high surface capacitance electrode (>100 mF cm−2) has to be produced while keeping low the footprint area. For carbide‐derived carbon (CDC) micro‐supercapacitors, the properties of the metal carbide precursor have to be fine‐tuned to fabricate thick electrodes. The ad‐atoms diffusion process and atomic peening effect occurring during the titanium carbide sputtering process are shown to be the key parameters to produce low stress, highly conductive, and thick TiC films. The sputtered TiC at 10−3 mbar exhibits a high stress level, limiting the thickness of the TiC‐CDC electrode to 1.5 µm with an areal capacitance that is less than 55 mF cm−2 in aqueous electrolyte. The pressure increase up to 10−2 mbar induces a clear reduction of the stress level while the layer thickness increases without any degradation of the TiC electronic conductivity. The volumetric capacitance of the TiC‐CDC electrodes is equal to 350 F cm−3 regardless of the level of pressure. High values of areal capacitance (>100 mF cm−2) are achieved, whereas the TiC layer is relatively thick, which paves the way toward high‐performance micro‐supercapacitors.
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Research context

Energy storage

OpenAlex topics: Supercapacitor Materials and Fabrication · Advancements in Battery Materials · Electrocatalysts for Energy Conversion

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Institut d'Electronique de Microélectronique et de Nanotechnologies Université de Lille CNRS Centrale Lille ISEN Université de Valenciennes UMR 8520 ‐ IEMN F‐59000 Lille France

Unité de Catalyse et de Chimie du Solide (UCCS) Université de Lille F‐59000 Lille France

CNRS Centrale Lille ENSCL Université d'Artois UMR 8181 – UCCS F‐59000 Lille France

Patrice Simon, Taberna Réseau sur le Stockage Electrochimique de l'Energie CNRS FR 3459, 33 rue Saint Leu 80039 Amiens Cedex France

Patrice Simon Centre Interuniversitaire de Recherche et d'Ingénierie des Matériaux (CIRIMAT) CNRS UMR 5085 – Université Paul Sabatier 118 route de Narbonne 31062 Toulouse France

Laboratoire de Réactivité et Chimie des Solides (LRCS) CNRS UMR 7314 – Université de Picardie Jules Verne 33 rue Saint Leu 80039 Amiens Cedex France

Laboratoire de Physique et Chimie des Nano Objets LPCNO UMR 5215 INSA‐UPS‐CNRS Université de Toulouse 31077 Toulouse France

Institut National des Sciences Appliquées 135 avenue de Rangueil 31077 Toulouse France

AIME Université de Toulouse INSA, UPS, INP 135 avenue de Rangueil 31077 Toulouse Cedex 4 France

Funding

European Research Council

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