Self‐Aligned and Scalable Growth of Monolayer WSe₂–MoS₂ Lateral Heterojunctions

Abstract 2D layered heterostructures have attracted intensive interests due to their unique optical, transport, and interfacial properties. The laterally stitched heterojunction based on dissimilar 2D transition metal dichalcogenides forms an intrinsic p–n junction without the necessity of applying an external voltage. However, no scalable processes are reported to construct the devices with such lateral heterostructures. Here, a scalable strategy, two‐step and location‐selective chemical vapor deposition, is reported to synthesize self‐aligned WSe₂–MoS₂ monolayer lateral heterojunction arrays and demonstrates their light‐emitting devices. The proposed fabrication process enables the growth of high‐quality interfaces and the first successful observation of electroluminescence at the WSe₂–MoS₂ lateral heterojunction. The electroluminescence study has confirmed the type‐I alignment at the interface rather than commonly believed type‐II alignment. This self‐aligned growth process paves the way for constructing various 2D lateral heterostructures in a scalable manner, practically important for integrated 2D circuit applications.