Highly Sensitive Cationic Photoresist for High‐Throughput Two‐Photon Nanofabrication
Source abstract
Abstract
Abstract Two‐photon lithography (TPL) is a powerful tool for 3D nanofabrication, however, high‐throughput TPL remains challenging, especially for cationic‐based photoresists. A novel cationic‐based photoresist named TP‐EO is developed for high‐throughput and high‐resolution TPL nanofabrication. High‐speed fabrication is achieved by using a bimolecular photosensitizer‐photo acid generator (PS‐PAG) pair that can effectively solve the photosensitivity bottleneck in cationic‐based photoresists. High‐resolution nanofabrication is achieved by limiting the photoacid diffusion via tuning the monomer's intra‐ and inter‐molecular stereo‐structure. The fabrication of 3D structures is demonstrated with fine features (<200 nm), fast writing speed (100 mm s−1), and low shrinkage, and showcased the rapid fabrication of centimeter‐scale nanodevices. TP‐EO photoresist shows outstanding TPL fabrication speed and resolution among cationic‐based photoresists, making it a promising solution for high‐throughput 3D nanomanufacturing.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Nonlinear Optical Materials Studies · Nanofabrication and Lithography Techniques · Neuroscience and Neural Engineering
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Zhejiang Lab Hangzhou 310000 China
Zhejiang Yangfan New Materials Co., Ltd. Shangyu 312300 China
CAS Key Laboratory of Mechanical Behavior and Design of Materials Department of Modern Mechanics CAS Center for Excellence in Complex System Mechanics Department of Chemistry Department of Precision Machinery and Precision Instruments University of Science and Technology of China Hefei 230000 China
State Key Laboratory of Extreme Photonics and Instrumentation College of Optical Science and Engineering College of Biomedical Engineering and Instrument Science Zhejiang University Hangzhou 310000 China
School of Mechanical Engineering Hangzhou Dianzi University Hangzhou 310000 China
Funding
National Natural Science Foundation of China · China Postdoctoral Science Foundation
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