Structural, optical, and electrical properties of tin sulfide thin films grown with electron-beam evaporation

Abstract The effect of growth temperature on the phase evolution and morphology change of tin sulfide thin films by electron-beam evaporation was investigated. Orthorhombic tin monosulfide (SnS) was dominant at low growth temperature of 25 °C, whereas a sulfur-rich phase of Sn 2 S 3 coalesced as the growth temperature increased over 200 °C. Thin film growth ceased at 280 °C due to re-evaporation of the tin sulfide. The dependence of growth temperature on the phase evolution of tin sulfide was confirmed by X-ray diffraction, scanning electron microscopy, and UV–Vis spectrophotometry. The lowest electrical resistivity of ∼51 Ω cm, with a majority hole concentration of ∼10 17 cm − 3 , was obtained for the film grown at 100 °C, and the resistivity drastically increased with increasing growth temperature. This behavior was correlated with the emergence of resistive sulfur-rich Sn 2 S 3 phase at high temperatures.