Flexible metal–insulator–metal (MIM) devices for plastic film AM-LCD
Source abstract
Abstract
Abstract We developed new flexible metal–insulator–metal (MIM) devices subject to plastic film substrate. The structure of the MIM device is that a Ta2O5 insulator is covered with two flexible Al electrodes on both sides. The flexible structure of the MIM device was successfully fabricated applying our own etch-free process.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced Sensor and Energy Harvesting Materials · Semiconductor materials and devices · 3D IC and TSV technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (7)
Show source-provided references
1. R. Baeuerle et al., A MIM driven display with colour filters on 2 diagonal plastic substrates, SID 99 Digest, p. 143
2. S.J. Hong et al., High performance MIM device with low threshold voltage and perfect symmetry, SID 01 Digest, p. 63410.1889/1.1831941 ↗
3. S.J. Hong et al., High performance mim devices for plastic film AM-LCD, Asia Display/IDW '01, p. 403
4. Mechanics of rollable and foldable film-on-foil electronics10.1063/1.123478 ↗
5. Fukuyama et al., Method of making two terminal nonlinear device and liquid crystal apparatus including the same, US Patent 5,654,207, August 1997
6. AFM study of the dielectric breakdown in films Ta2O510.1021/cm00057a016 ↗
7. Effects of postannealing on current–voltage characteristics of metal–insulator (Ta2O5)–metal type thin-film diode