Fast, Accurate and Full Extraction of Coupling-of-Modes Parameters by Finite Element Method
Source abstract
Abstract
This paper presents a new numerical approach for the full extraction of the coupling-of-modes (COM) parameters by stationary and eigenfrequency analyses in the finite element method (FEM). This is a fast method extracting from the results of static analysis and eigenfrequency analysis. It avoids the long calculation time of admittance frequency response analysis, which is commonly used in extracting COM parameters. In addition to the usual COM parameters (velocity, reflection coefficient, transduction coefficient and capacitance), the phases of reflection and transduction coefficient can be also extracted with this method. The proposed method was applied to different cutting types LiNbO3 with different types of thicknesses in a varying interdigital transducer (IDT). These examples show that our approach has great potential in extracting all the COM parameters of the Rayleigh SAW for all kinds of IDT structures. Therefore, it is a fast, accurate, general and full extraction approach of COM parameters.
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Research context
OpenAlex topics: Acoustic Wave Resonator Technologies · Advanced MEMS and NEMS Technologies · Mechanical and Optical Resonators
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Optoelectronic Engineering, Xi’an Technological University, Xi’an 710021, China
School of Microelectronics, Xidian University, Xi’an 710071, China
School of Information Science and Engineering, Shandong Normal University, Jinan 250358, China
State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China
Funding
the Natural Science Basic Research Program of Shaanxi · the Scientific Research Program of Shaanxi Provincial Education Department · the National Natural Science Foundation of China
References (36)
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