journal article·2010-02-11

Electrical Measurement Techniques in Atomic Force Microscopy

Alba Avila, Bharat Bhushan

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Abstract

A conductive tip in an atomic force microscope (AFM) has extended the capability from conventional topographic imaging to electrical surface characterization. The conductive tip acts as a voltage electrode to provide stimuli and monitor electrical surface properties. In this review article, we have organized the AFM electrical techniques based on whether the electrical properties are monitored at the cantilever tip or across the sample. Furthermore, the techniques are organized based on probe detection signal. A number of acronyms are used in the literature, and the more commonly used ones are identified. The principle of each technique is described, and representative applications are presented. A better understanding of the spectrum of techniques should serve as the driver to expand the application of electrical techniques to study interdisciplinary phenomena at the nanoscale.
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Research context

OpenAlex topics: Force Microscopy Techniques and Applications · Integrated Circuits and Semiconductor Failure Analysis · Electrochemical Analysis and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

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