High-κ Dielectric Materials for Microelectronics
Source abstract
Abstract
This article reviews the current status of high-κ dielectric materials for microelectronics. In particular, recent work impacting the integration of these high-κ materials for gate dielectric and capacitor applications in advanced scaled microelectronic devices is reviewed.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Semiconductor materials and devices · Ferroelectric and Piezoelectric Materials · Ferroelectric and Negative Capacitance Devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References
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