A Critical Review of Chemical Vapor-Deposited (CVD) Diamond for Electronic Applications
Source abstract
Abstract
ABSTRACT The objective of this article is to describe the present understanding of the growth, processing, and properties of diamond for electronic applications.
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Semiconductor materials and devices · Advanced materials and composites
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (100+)
Show source-provided references
1. 10.1038/176051a010.1038/176051a0 ↗
2. 10.1080/0001873860010191110.1080/00018738600101911 ↗
3. Ralph W. G. Wykoff ,Crystal Structures, 2nd edition , Interscience Publishers , New York , p. 26 ( 1963 ).
4. C. Y. Fong and B. M. Klein ,Diamond: Electronic Properties and Applications, p. 9 , Lawrence S. Pan and Don R. Kania , Eds. Kluwer Academic Publishers , Boston ( 1995 ).
5. Yin M. · Phys. Rev. · 1981 · 24 · 612110.1103/PhysRevB.24.6121 ↗
6. 10.1557/JMR.1995.253110.1557/JMR.1995.2531 ↗
7. Neuville S. · MRS Bull. · 1997 · 22 · 2210.1557/S0883769400033765 ↗
8. 10.1088/0034-4885/59/12/00210.1088/0034-4885/59/12/002 ↗
9. 10.1016/0257-8972(93)90261-L10.1016/0257-8972(93)90261-L ↗
10. 10.1557/JMR.1999.014010.1557/JMR.1999.0140 ↗
11. Lonsdale K. · Am. Miner · 1971 · 56 · 333
12. Sozin Yu I. · Sverkhtverdye Materialy · 1986 · 8 · 12
13. 10.1063/1.34751910.1063/1.347519 ↗
14. 10.1063/1.35216810.1063/1.352168 ↗
15. Collins C. · Diamond Films Technol. · 1992 · 2 · 25
16. 10.1557/JMR.1995.254810.1557/JMR.1995.2548 ↗
17. 10.1117/12.18313610.1117/12.183136 ↗
18. 10.1557/PROC-416-31910.1557/PROC-416-319 ↗
19. 10.1103/PhysRev.77.38810.1103/PhysRev.77.388 ↗
20. A. T. Collins and E. C. Lightowlers ,The Properties of Diamond, J. E. Fields , Ed. , Academic Press , London , p. 79 ( 1979 ).
21. 10.1557/PROC-416-34310.1557/PROC-416-343 ↗
22. 10.1063/1.34953910.1063/1.349539 ↗
23. 10.1016/0925-9635(91)90005-U10.1016/0925-9635(91)90005-U ↗
24. 10.1016/0257-8972(89)90055-810.1016/0257-8972(89)90055-8 ↗
25. 10.1063/1.10275810.1063/1.102758 ↗
26. 10.1557/PROC-242-2310.1557/PROC-242-23 ↗
27. P. K. Bachmann ,General Aspects of CVD Growth of Diamond and Their Correlation, Properties and Growth of Diamond, G. Davies , Ed. , Data Reviews Series No. 9 , INSPEC , London 364 ( 1994 ).
28. 10.1007/BF0120347210.1007/BF01203472 ↗
29. A. R. Badzian , inAdvances in X-Ray Analysis, C. S. Barrett , J. V. Grefrich , R. Kenkins , J. C. Russ , J. W. Richardson , and P. K. Predeck , Eds. , Plenum Press , New York , 31 : 113 ( 1988 ).
30. T. R. Anthony ,Methods of Diamond Making, Diamond and diamond-like films and coatings, NATO Advanced Study Institute on Diamond and Diamond-like Films, R. E. Clausing , L. L. Horton , J. C. Agnus , and P. Koidl , Eds. , Plenum Press , New York , 555 ( 1991 ).10.1007/978-1-4684-5967-8_36 ↗
31. 10.1063/1.34971210.1063/1.349712 ↗
32. 10.1063/1.11373210.1063/1.113732 ↗
33. 10.1143/JJAP.26.L52710.1143/JJAP.26.L527 ↗
34. Lewis B. · 1978
35. 10.1016/0042-207X(90)93945-F10.1016/0042-207X(90)93945-F ↗
36. 10.1557/JMR.1994.216410.1557/JMR.1994.2164 ↗
37. 10.1557/JMR.1993.285810.1557/JMR.1993.2858 ↗
38. 10.1016/0925-9635(93)90005-M10.1016/0925-9635(93)90005-M ↗
39. 10.1016/0925-9635(93)90075-D10.1016/0925-9635(93)90075-D ↗
40. 10.1016/0925-9635(93)90096-K10.1016/0925-9635(93)90096-K ↗
41. 10.1016/0925-9635(93)90218-Q10.1016/0925-9635(93)90218-Q ↗
42. 10.1016/0925-9635(93)90258-410.1016/0925-9635(93)90258-4 ↗
43. 10.1063/1.11348610.1063/1.113486 ↗
44. 10.1063/1.10441510.1063/1.104415 ↗
45. 10.1063/1.10977110.1063/1.109771 ↗
46. 10.1063/1.10904110.1063/1.109041 ↗
47. 10.1063/1.10873810.1063/1.108738 ↗
48. 10.1080/1042691920894742810.1080/10426919208947428 ↗
49. 10.1557/JMR.1994.161910.1557/JMR.1994.1619 ↗
50. 10.1063/1.10567810.1063/1.105678 ↗
51. 10.1063/1.35147510.1063/1.351475 ↗
52. 10.1063/1.10881110.1063/1.108811 ↗
53. Malshe A. · Proc. of Int. Mtg. of the Electrochem. Soc. · 1998 · 97 · 399
54. Jyn-Ming T · J. Mater. · 1994 · 23
55. M. J. Ulczynski , D. K. Reinhard , M. Prystajko , and J. Asmussen ,Advances in New Diamond Science and Technology, S. Saito , N. Fujimori , O. Fukunaga , M. Kamo , K. Kobashi and M. Yoshikawa , Eds. , MYU , Tokyo , p. 41 ( 1994 ).
56. 10.1557/JMR.1996.012710.1557/JMR.1996.0127 ↗
57. 10.1063/1.10527610.1063/1.105276 ↗
58. 10.1016/0025-5408(92)90087-G10.1016/0025-5408(92)90087-G ↗
59. 10.1557/JMR.1995.110810.1557/JMR.1995.1108 ↗
60. 10.1007/BF0279035010.1007/BF02790350 ↗
61. Thürer K-H. · Electrochem. Soc. Proc. · 1998 · 97 · 142
62. 10.1016/S0925-9635(96)00721-210.1016/S0925-9635(96)00721-2 ↗
63. Kurashima N. · Electrochem. Soc. Proc. · 1998 · 97 · 189
64. 10.1063/1.11231510.1063/1.112315 ↗
65. Silva Francois · Electrochem. Soc. Proc. · 1998 · 97 · 99
66. Spitsyn B. · Electrochem. Soc. Proc. · 1998 · 97 · 70
67. Field J. · 1979
68. Takeyasu Saito · Electrochem. Soc. Proc. · 1998 · 97 · 88
69. 10.1143/JJAP.29.82410.1143/JJAP.29.824 ↗
70. Feldman A. · J. Res. Natl. Inst. Stand. Technol. · 1993 · 98 · 37510.6028/jres.098.029 ↗
71. 10.1115/1.290932910.1115/1.2909329 ↗
72. Albert Feldmane ,Applications of Diamond Films and Related Materials: Third International Conference, 1995, A. Feldman , Y. Tzeng , W. A. Yarborough , M. Yoshikawa , and M. Murakawa , Eds. , 627 ( 1995 ).10.6028/NIST.IR.5692 ↗
73. 10.1557/JMR.1997.024810.1557/JMR.1997.0248 ↗
74. A. P. Malshe , H. A. Naseem , W. D. Brown , and L. W. Schaper ,Applications of Diamond Films and Related Materials: Third International Conference, 1995, A. Feldman , Y. Tzeng , W. A. Yarborough , M. Yoshikawa , and M. Murakawa , Eds. , 611 ( 1995 ).
75. W. E. Wesolowski , R. J. DeKenipp , and M. P. Ram Panicker ,Proceedings of International Conference on Multichip Modules –ICEMCM'95, 146 ( 1995 ).
76. Gordon M. · Proceedings of the 1995 ASME International Mechanical Engineering Congress and Exposition · 1995 · 319 · 145
77. 10.1016/0925-9635(94)00251-710.1016/0925-9635(94)00251-7 ↗
78. Watenneyer B. · 1982
79. Grodzinski P. · 1953
80. Yoshikawa M. · Diamond Optics · 1990 · 210
81. Tokura H. · Applications of Diamond Films and Related Materials: 3rd International Conference · 1995 · 253
82. 10.1016/0925-9635(95)00271-510.1016/0925-9635(95)00271-5 ↗
83. C-F. Yang , H. Okura , and M. Yoshikawa ,Science and Technology of New Diamond, S. Saito , O. Fukunaga and M. Yoshikawa , Eds. , p. 135 ( 1990 ).
84. 10.1016/0925-9635(92)90116-610.1016/0925-9635(92)90116-6 ↗
85. S. Jin , W. Zhu , and J. E. Graebner ,Applications of Diamond Films and Related Materials: 3rd International Conference, 209 ( 1995 ).
86. Jin S. · Electrochemical Society Proceedings · 1997 · 97 · 422
87. Raju G. · 1994
88. Tezuka S. · New Diamond · 1990 · 17 · 36
89. Rochechild M. · J. Vac. Sci. Technol. · 1986 · 4 · 310
90. 10.1016/S0925-9635(97)00141-610.1016/S0925-9635(97)00141-6 ↗
91. Chien T. · Applications of Diamond and Related Materials: 3rd International Conference · 1995 · 257
92. 10.1016/S0925-9635(99)00088-610.1016/S0925-9635(99)00088-6 ↗
93. 10.1016/0925-9635(92)90101-S10.1016/0925-9635(92)90101-S ↗
94. Ravi K. · 1993
95. Tosin P. · Applications of Diamond Films and Related Materials: 3rd International Conference · 1995 · 271
96. Malshe A. · 1997
97. 10.1364/AO.31.00148310.1364/AO.31.001483 ↗
98. 10.1557/JMR.1998.024010.1557/JMR.1998.0240 ↗
99. 10.1063/1.10189010.1063/1.101890 ↗
100. Pawar M. · The Int. J. Microcircuits Electron. Pack. · 1996 · 19 · 316