journal article·2000-02

SiNx-Submicrometer Coatings: Optimization of Film Properties

L. Tikana, M. Pohl, A. Zösch, W. Zahn, W. Wuttke

Advanced Engineering Materials· Volume 2· Issue 1-2
Publisher page

Abstract

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Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Metal and Thin Film Mechanics · Advanced ceramic materials synthesis · Copper Interconnects and Reliability

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