Stresses in Multilayer Systems: Test of the sin2Ψ Method

The “sin2Ψ” method based on the asymmetric X-ray diffraction is widely used to determine stresses in thin films. However, application of this method to multilayered thin films is not straightforward. In this work the authors present experimental asymmetric X-ray diffraction maps obtained for Cu/Ni and Au/Ni multilayered systems. They also describe the model based on a Monte Carlo simulation for calculating the X-ray diffraction profiles from multilayers.