journal article·2005-09

Scanned Probe Microscopy‐Mediated Patterning of Metallic Nanostructures

L. C. Teague, J. D. Batteas

Advanced Engineering Materials· Volume 7· Issue 9
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Abstract

Abstract Engineering sub‐100 nm features on surfaces is of increasing importance for the development of new device technologies. To this end, researchers are developing scanned probe based approaches for the patterning of nanoscale metallic structures on surfaces.
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Research context

OpenAlex topics: Nanofabrication and Lithography Techniques · Force Microscopy Techniques and Applications · Advanced Surface Polishing Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

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