Net Shape Reaction Bonded Ceramic Micro Parts by Mechanical Microstructuring
Source abstract
Abstract
Net shape ceramic micro components can be realized by mechanical microstructuring green blanks consisting of precursor materials followed by reaction bonding. The precursor material is composed of mainly zirconium silicide as reactive precursor material, organosilicon polymer (PMSS) as low loss binder and zirconium oxide as an inert phase. Shaping in the green state can easily be performed by micro milling, even if different cutting strategies are applied. Subsequently the components are thermally processed for ceramization and for sintering them to full density. Dependent on the material composition and on the green density the dimensions of the sintered components are retained unchanged compared to the dimensions of the green parts.
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Research context
OpenAlex topics: Nanofabrication and Lithography Techniques · Injection Molding Process and Properties · Additive Manufacturing and 3D Printing Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (34)
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