journal article·2009-06

New Materials in Memory Development Sub 50 nm: Trends in Flash and DRAM

Karl Heinz Kuesters, Marc Florian Beug, Uwe Schroeder, Nicolas Nagel, Ulrike Bewersdorff, Gerald Dallmann, Stefan Jakschik, Roman Knoefler, Stephan Kudelka, Christoph Ludwig, Dirk Manger, Wolfgang Mueller, Armin Tilke

Advanced Engineering Materials· Volume 11· Issue 6
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Abstract

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Research context

OpenAlex topics: Semiconductor materials and devices · Advancements in Semiconductor Devices and Circuit Design · Advanced Memory and Neural Computing

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References (38)

Show source-provided references
1. ITRS roadmap seehttp://www.itrs.net
2. 10.1038/nprot.2007.53510.1038/nprot.2007.535 ↗
3. 10.1109/IEDM.2004.141931910.1109/IEDM.2004.1419319 ↗
4. 10.1109/.2006.162947410.1109/.2006.1629474 ↗
5. Shin Y. · IEDM Tech. Dig. · 2005 · 13 · 337
6. Park Youngwoo · IEDM Tech. Dig. · 2006 · 29
7. Specht M. · ESSDERC · 2003 · 155
8. 10.1063/1.134389210.1063/1.1343892 ↗
9. T.Mikolajick N.Nagel S.Riedel T.Mueller K. H.Kuesters proceedings VLSI‐TSA2007 130.
10. Mueller W. · IEDM Tech. Dig. · 2005 · 339
11. 10.1109/55.87720510.1109/55.877205 ↗
12. 10.1063/1.189743110.1063/1.1897431 ↗
13. Lee C. H. · VLSI symposium Tech. Dig. · 2006 · 3.4
14. Breuil L. · proceedings icmtd‐nvsmw · 2008 · 126
15. T.Melde F.Beug M.Isler L.Bach M.Ackermann S.Riedel C.Ludwig proceedings icmtd‐nvsmw2008 IEEE ISBN 1‐4244‐1546‐2 130.10.1109/NVSMW.2008.46 ↗
16. Furnemont A. · proceedings ICMTD · 2007 · 205
17. H. T.Lue A. C.Lai C. W.Liao T.‐B.Wu M. J.Yang Y. H.Lue J. Y.Hsieh S. Y.Wang G. L.Luo C. H.Chien K. Y.Hsieh R.Liu C. Y.Lu proceedings VLSI‐TSA2008.
18. U.Schroeder Freiberger Silicium Days2007 Freiberger Forschungshefte in press.
19. Kil D. S. · VLSI Symposium Tech. Dig. · 2004 · 73
20. U.Schroeder DPG Spring Meeting2008.
21. 10.1109/IEDM.2004.141906810.1109/IEDM.2004.1419068 ↗
22. Kil D. S. · VLSI Symposium Tech. Dig. · 2006 · 73
23. 10.1063/1.152282610.1063/1.1522826 ↗
24. 10.1109/.2005.146920210.1109/.2005.1469202 ↗
25. W.Weinreich AVS‐ALD conference2008 Bruges.
26. 10.1088/0022-3727/41/17/17200510.1088/0022-3727/41/17/172005 ↗
27. J.Niiniströ this volume.
28. 10.1016/j.sse.2004.11.01110.1016/j.sse.2004.11.011 ↗
29. 10.1002/adma.20089006710.1002/adma.200890067 ↗
30. 10.1109/LED.2004.82857010.1109/LED.2004.828570 ↗
31. Tateshita Y. · IEDM Tech. Dig. · 2006 · 63
32. Harris H. R. · VLSI Symposium Tech. Dig. · 2007 · 154
33. Chudzik M. · VLSI Symposium Tech. Dig. · 2007 · 194
34. Hyun S. · VLSI Symposium Tech. Dig. · 2007 · 184
35. Sivasubramani P. · VLSI Symposium Tech. Dig. · 2007 · p 68
36. 10.1109/VLSIT.2008.458856410.1109/VLSIT.2008.4588564 ↗
37. Kubicek S. · IEDM Tech. Dig. · 2007 · 49
38. G.Jin et al. 2nd International Workshop on Nanoscale Semiconductor Devices 2005.