Fabricating Three‐Dimensional Periodic Micro Patterns on Photo‐Resists Using Laser Interference Lithography

Springtails are hexapods, which have a complex skin surface composed of periodically arranged mushroom‐like features. This topography offers surface functionalities like non‐wetting and preventing bacterial settlement. This study demonstrates a novel way of replicating the morphology of the springtail skin using interference lithography. The micro patterns are produced with an undercut contour in a multilayer resist system on Si‐wafers consisting of a lower lift‐off resist and an upper photo‐sensitive resist. After irradiation, several developing and rinsing steps are carried out to produce cavities in the lift‐off resist layer with an undercut geometry directly below the SU‐8 top layer.