journal article·2008-07

Nanoscaled Multilayer Coatings for X‐Ray Optics

F. Hertlein, S. Kroth, C. Michaelsen, A. Oehr, J. Wiesmann

Advanced Engineering Materials· Volume 10· Issue 7
Publisher page

Abstract

Incoatec develops and produces multilayer X-ray optics with single layers of a few nanometers thickness. These optics are used in X-ray diffractometers (XRD), X-ray fluorescence spectrometers (XRF), single crystal diffraction (SCD) applications and at synchrotron sources. In this contribution, details of the production of multilayer X-ray optics with sputter deposition methods are described.
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Research context

OpenAlex topics: Metal and Thin Film Mechanics · X-ray Diffraction in Crystallography · Advanced Materials Characterization Techniques

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References (5)

Show source-provided references
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