Influence of Annealing on the Residual Stress in Sputter-Deposited Platinum Films

The changes of residual stress in commercially produced platinum layers during heat treatment are studies in this paper. X-ray stress determination techniques yield, superimposed, both the thermal and intrinsic stresses in the layer. An analytical model, following the method of Tsui and Clyne, is used to separate these two stress contributions. This allows one to interpret the development of the intrinsic stress under thermal influence.