Morphology and Growth Process of Carbon Films Prepared by Microwave / Radio Frequency Plasma Assisted CVD
Source abstract
Abstract
In this work the carbon coatings created by microwave/radio frequency plasma assisted chemical vapour deposition method were investigated. The deposition parameters were optimized in order to obtain homogeneous carbon coatings on such different substrates as AISI 316L steel and silicon. The MW/RF PACVD technique is promising for many different types of applications.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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