Effect of Pulsed Laser Irradiation on Microstructure and Evolution of Residual Stress for Gold Film
Source abstract
Abstract
Gold film is extensively used in a variety of electronic, optical, and magnetic instruments or devices. Effect of pulsed laser irradiation on microstructure and evolution of residual stress for gold film is studied. Gold film deposited on a silica substrate is irradiated by pulsed laser with different energy densities. Microstructures of the gold film before and after laser irradiation are studied by using scanning electron microscope, scanning transmission electron microscope, and energy‐dispersive X‐ray spectrometry. Recrystallization occurs during laser irradiation. Most of the original defects in the as‐deposited gold film are eliminated, and the films become smooth and more compact after laser irradiation. Curvature‐based technique using Stoney formula is applied to evaluate the residual stress. Pulsed laser irradiation results in the increase in tensile residual stress and stability of the residual stress.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Laser Material Processing Techniques · Metal and Thin Film Mechanics · Surface Roughness and Optical Measurements
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
School of Mechanical Electronic and Information Engineering China University of Mining and Technology (Beijing) Beijing 100083 China
State Key Laboratory of Tribology Tsinghua University Beijing 100084 China
Research and Development Department (R&D) Shengyi Technology (Beijing) Co., LTD. Beijing 100176 China
Funding
National Natural Science Foundation of China
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