Subsurface Imaging of Microfabricated Silicon Membrane–Cavity Structures Using Near‐Infrared Interferometry
Source abstract
Abstract
The article number 2200531 by Bong Jae Lee, Jungchul Lee, and co-workers report a scanning near-IR interferometric microscope that enables non-destructive subsurface inspection of multi-layered silicon membrane-cavity structures with submicrometer to single-digit-micrometer vertical dimension. The light rays reflected from each interface interfere with the reference beam in an interferometric objective lens that vertically scans the device under test by a piezo positioner.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Near-Field Optical Microscopy · Integrated Circuits and Semiconductor Failure Analysis · Force Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Mechanical Engineering Korea Advanced Institute of Science and Technology Daejeon 34141 South Korea
Center for Extreme Thermal Physics and Manufacturing Korea Advanced Institute of Science and Technology Daejeon 34141 South Korea
References
Reference metadata was not supplied for this record.