Two‐ and Three‐Dimensional Micro‐ and Sub‐Micrometer Periodic Structures Using Two‐Beam Laser Interference Lithography

Abstract In this study, we present different approaches for the fabrication of two and three dimensional structures using two‐beam interference lithography. The advantages of using more than one irradiation step for the fabrication of complex structures are theoretically demonstrated by avoiding the introduction of line effects. For the fabrication of 3D structures, two alternatives are discussed including a layer by layer approach as well as a multidimensional (non‐orthogonal) interference exposure setup. Finally, an example of biomimetic patterning is given. In all cases, numerical calculations showed a good agreement with the experimental results, being able to explain the shape of the fabricated structures.