Quantitative Elastic‐Property Measurements at the Nanoscale with Atomic Force Acoustic Microscopy
Source abstract
Abstract
Abstract We are developing metrology for rapid, quantitative assessment of elastic properties with nanoscale spatial resolution. Atomic force acoustic microscopy (AFAM) methods enable measurements of modulus at either a single point or as a map of local property variations. The information obtained furthers our understanding of nanopatterned surfaces, thin films, and nanoscale structures.
Source: crossref · Quality: baseline
Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Metal and Thin Film Mechanics · Advanced Surface Polishing Techniques
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References (13)
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