DataVXAdvanced Energy MaterialsPaper
journal article·2014-06

Silicon‐Microtube Scaffold Decorated with Anatase TiO2 as a Negative Electrode for a 3D Litium‐Ion Microbattery

Etienne Eustache, Pascal Tilmant, Laurence Morgenroth, Pascal Roussel, Gilles Patriarche, David Troadec, Nathalie Rolland, Thierry Brousse, Christophe Lethien

Advanced Energy Materials· Volume 4· Issue 8
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Source abstract

Abstract

An optimized scaffold based on silicon microtubes is designed to increase the surface capacity of 3D lithium‐ion microbatteries. High‐depth, mechanically robust microstructures are fabricated using microelectronic facilities. Conformal deposition of anatase TiO2 is achieved using atomic layer deposition, realizing the targeted improvement for microbatteries; a surface capacity of 0.2 mA h cm–2 at a charge rate of C/10 is obtained in standard liquid electrolyte. This work paves the way for the fabrication of solid‐state 3D Li‐ion microbatteries with an efficient 3D scaffold.
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Research context

Energy storageMaterials processing

OpenAlex topics: Advancements in Battery Materials · Advanced Battery Materials and Technologies · Supercapacitor Materials and Fabrication

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Institut d'Electronique, de Microélectronique et de Nanotechnologie (IEMN) CNRS UMR 8520 – Université de Lille 1 Sciences et Technologies BP 60069 59652 Villeneuve d'Ascq CEDEX France

Institut des Matériaux de Nantes Jean Rouxel (IMN JR) CNRS UMR 6502 – Université de Nantes 2 rue de la Houssinière, BP32229 44322 Nantes CEDEX 3 France

Institut de Recherche sur les Composants logiciels et matériels pour l'Information et la Communication Avancée (IRCICA) CNRS USR 3380 – Université Lille 1 Sciences et Technologies 50 avenue Halley 59650 Villeneuve d'Ascq France

Réseau sur le Stockage Electrochimique de l'Energie (RS2E) CNRS FR 3459 33 rue Saint Leu 80039 Amiens CEDEX France

Unité de Catalyse et de Chimie du Solide (UCCS) CNRS UMR 8181 – Université Lille 1 Sciences et Technologies 59655 Villeneuve d'Ascq CEDEX France

Laboratoire de Photonique et de Nanostructures (LPN) CNRS UPR 20 – Site Alcatel de Marcoussis Route de Nozay 91460 Marcoussis France

Funding

ANR · DGA

References (43)

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