DataVXJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and FilmsPaper
journal article·1988-05-01

Summary Abstract: Desorption dynamics of SiF4 etch product

F. A. Houle

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films· Volume 6· Issue 3
Publisher page
Source abstract

Abstract

First Page
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Silicon and Solar Cell Technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

IBM Almaden Research Center, San Jose, California 95120

References

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