Erratum: Determination of electrode/substrate surface temperatures through the solid–liquid transition of metals/eutectics in capacitively coupled radio frequency-plasma chemical vapor deposition reactors [J. Vac. Sci. Technol. A 8 , 3954 (1990)]
Source abstract
Abstract
Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation M. Shinohara, H. Tashiro, K. Saio, K. Arai, K. Takayama; Erratum: Determination of electrode/substrate surface temperatures through the solid–liquid transition of metals/eutectics in capacitively coupled radio frequency‐plasma chemical vapor deposition reactors [J. Vac. Sci. Technol. A 8, 3954 (1990)]. Journal of Vacuum Science & Technology A 1 November 1991; 9 (6): 3183. https://doi.org/10.1116/1.577144 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology A Search Advanced Search |Citation Search
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Plasma Diagnostics and Applications · Copper Interconnects and Reliability
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Institute of Research & Development, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-12 Japan
References
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