journal article·1995-09-01

Adsorption Species of Transition Metal Ions on Silicon Wafer in SC‐1 Solution

Yoshihiro Mori, Kenichi Uemura, Kengo Shimanoe, Tadashi Sakon

Publisher page

Abstract

Adsorption of transition metal ions such as Fe(III), Ni(II), and Zn(II) on silicon wafers in ammoniac hydrogen peroxide solution (SC‐1 solution) has been studied. It was found by comparing the experimental results with the equilibrium calculations that the main adsorption species is the dissolved neutral hydroxide complex. This was supported by the calculated free energy change of adsorption of hydroxide complexes.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Analytical Chemistry and Sensors

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Affiliations

Nippon Steel Corporation, Electronics Research Laboratories, 3434 Shimata, Hikari, Yamaguchi 743, Japan

Nippon Steel Corporation, Advanced Materials and Technology Research Laboratories, 1618 Ida, Nakahara‐ku, Kawasaki, Kanagawa 211, Japan

References

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