The Technology of Chromium Oxide Passivation on Stainless Steel Surface
Source abstract
Abstract
A complete chromium oxide passivation technology has been developed for stainless steel surfaces for use in high purity gas‐delivery systems and process chambers. Starting with an electrochemical buffing (ECB) to add to electropolished (EP) SUS316L stainless steel material, an optimal thermal treatment was found by using a gas mixture of 10% hydrogen, 1–10 ppm oxygen and argon balance gas at 500°C for 1 h. Five‐day corrosion tests with gas (containing 1.4 ppm moisture) at 5 kg/cm 2 and 100°C showed no sign of corrosion on the chromium oxide passivated surface. Chemical stability tests on this surface with silane specialty gas thermal decomposition also showed a remarkable noncatalytic activity compared with conventional surfaces.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Nuclear Materials and Properties · Hydrogen embrittlement and corrosion behaviors in metals · Plasma Diagnostics and Applications
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Affiliations
Department of Electronics, Faculty of Engineering, Tohoku University, Sendai 980, Japan
References
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