Pitting of Sputtered Aluminum Alloy Thin Films
Source abstract
Abstract
Abstract not Available.
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Copper Interconnects and Reliability · Aluminum Alloy Microstructure Properties · Metal and Thin Film Mechanics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, New York 10598
References
Reference metadata was not supplied for this record.