journal article·1989-04-01Open access

Pitting of Sputtered Aluminum Alloy Thin Films

G. S. Frankel, M. A. Russak, C. V. Jahnes, M. Mirzamaani, V. A. Brusic

Abstract

Abstract not Available.
Only a short abstract or summary was supplied by the source.
Source: openalex_inverted_index · Quality: short

Research context

OpenAlex topics: Copper Interconnects and Reliability · Aluminum Alloy Microstructure Properties · Metal and Thin Film Mechanics

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

IBM Research Division, T.J. Watson Research Center, Yorktown Heights, New York 10598

References

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