Formation of Silicon Nitride at a Si ‐ SiO2 Interface during Local Oxidation of Silicon and during Heat‐Treatment of Oxidized Silicon in NH 3 Gas
Source abstract
Abstract
Abstract not Available.
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Source: openalex_inverted_index · Quality: short
Research context
OpenAlex topics: Silicon Nanostructures and Photoluminescence · Semiconductor materials and devices · Silicon and Solar Cell Technologies
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Affiliations
Philips Research Laboratories, Eindhoven, The Netherlands
References
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