Mass Spectrometric Study of Ga ( CH 3 ) 3 and Ga ( C 2 H 5 ) 3 Decomposition Reaction in H 2 and N 2
Source abstract
Abstract
Decomposition of trimethylgallium (TMG) and triethylgallium (TEG) in hydrogen and nitrogen atmospheres was studied by a quadrupole mass analyzer. The decomposition reactions of TMG in and in and of TEG in and in take place in the temperature ranges 370°–460°, 450°–570°, 220°–330°, and 270°–380°C, respectively. The reaction mechanisms are hydrogenolysis for TMG in , homolytic fission for TMG in , and β elimination for TEG in both and . The hydrogenolysis of TMG follows homogeneous first‐order kinetics on TMG concentration.
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Research context
OpenAlex topics: Catalytic Processes in Materials Science · Electron and X-Ray Spectroscopy Techniques · Ammonia Synthesis and Nitrogen Reduction
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Affiliations
NEC Corporation, Fundamental Research Laboratories, Miyazaki 4‐chome, Miyamae, Kawasaki 213, Japan
NEC Corporation, Opto‐Electronics Research Laboratories, Miyazaki 4‐chome, Miyamae, Kawasaki 213, Japan
References
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