Review—Recent Advances in Microfabrication, Design and Applications of Amperometric Sensors and Biosensors
Source abstract
Abstract
Over the past decade, the development of amperometric sensors and biosensors using microfabrication techniques has gained considerable attention. This interdisciplinary approach aims at bringing together scientific fields such as: chemistry, physics, engineering and biology to achieve devices’ miniaturization, integration and automatization. Among the technologies that have been reviewed for the fabrication of the microelectrodes, the most common are: soft lithography and microfabrication techniques, such as physical vapor deposition of different metals, photolithography, chemical wet etching method and anodic bonding process. The required parameters in the design of a microfabricated electrode array, such as inter-electrode distance, the three-electrode system, and the role of each electrode have been intensively discussed. This review provides an overview about the state-of-the-art microfabrication devices and their applications, as well as the recent advances in the fabrication of microelectrodes as transducers for amperometric sensors, immunosensors and biosensors with various applications in environmental, biomedical and pharmaceutical fields.
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Research context
OpenAlex topics: Analytical Chemistry and Sensors · Electrochemical Analysis and Applications · Electrochemical sensors and biosensors
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (66)
Show source-provided references
1. Luttge · 2016 · 1
2. Jackson · 2005 · 1
3. Betancourt · Int. J. Nanomedicine · 2006 · 1 · 48310.2147/nano.2006.1.4.483 ↗
4. Aldrigo · IEEE Access · 2020 · 8 · 19084310.1109/ACCESS.2020.3031310 ↗
5. Aldrigo · Nanomaterials · 2020 · 10 · 110.3390/nano10102057 ↗
6. Dragoman · Phys. E Low-Dimensional Syst. Nanostructures · 2021 · 126 · 11445110.1016/j.physe.2020.114451 ↗
7. Pustan · 201810.1109/DTIP.2018.8394201 ↗
8. Pustan · 201710.1109/DTIP.2017.7984473 ↗
9. Experimental investigation by atomic force microscopy on mechanical and tribological properties of thin films10.3139/146.111358 ↗
10. Reliability design of thermally actuated MEMS switches based on V-shape beams10.1007/s00542-015-2789-8 ↗
11. Ke · Talanta · 2020 · 211 · 12073410.1016/j.talanta.2020.120734 ↗
12. Blair · Biosens. Bioelectron. · 2019 · 134 · 5710.1016/j.bios.2019.03.055 ↗
13. Zhao · Int. J. Electrochem. Sci. · 2017 · 12 · 862210.20964/2017.09.39 ↗
14. Baracu · 2015 Int. Semicond. Conf. · 2015 · 2015 · 27110.1109/SMICND.2015.7355229 ↗
15. Puiu · Sensors (Switzerland) · 2018 · 18 · 354110.3390/s18103541 ↗
16. Jothimuthu · Microdevices · 2011 · 13 · 69510.1007/s10544-011-9539-1 ↗
17. Marland · IEEE Trans. Semicond. Manuf. · 2020 · 33 · 19610.1109/TSM.2020.2983875 ↗
18. Pitman · ECS Trans. · 2017 · 77 · 177110.1149/07711.1771ecst ↗
19. Pitman · Electroanalysis · 2017 · 29 · 24910.1002/elan.201600559 ↗
20. Sakamoto · Sensors Actuators, B Chem. · 2018 · 260 · 70510.1016/j.snb.2017.12.196 ↗
21. Chen · Analyst · 2010 · 135 · 101010.1039/b924545f ↗
22. Xu · Food Chem. · 2016 · 201 · 19010.1016/j.foodchem.2016.01.078 ↗
23. Jothimuthu · Electroanalysis · 2013 · 25 · 40110.1002/elan.201200530 ↗
24. Pei · J. Electrochem. Soc. · 2014 · 161 · B316010.1149/2.022402jes ↗
25. Zhang · Talanta · 2015 · 132 · 32110.1016/j.talanta.2014.08.075 ↗
26. Simionescu · J. Electrochem. Soc. · 2020 · 167 · 12651010.1149/1945-7111/abb1d4 ↗
27. Yin · Sensors Actuators, B Chem. · 2019 · 281 · 39210.1016/j.snb.2018.10.097 ↗
28. Yin · RSC Adv. · 2019 · 9 · 1969910.1039/C9RA01987A ↗
29. Yin · Electrochim. Acta · 2020 · 335 · 13566010.1016/j.electacta.2020.135660 ↗
30. Lete · Sens. Actuators B Chem. · 2020 · 316 · 12810210.1016/j.snb.2020.128102 ↗
31. Hassan · Microchim. Acta · 2020 · 187 · 49110.1007/s00604-020-04445-x ↗
32. El-Mosallamy · Anal. Bioanal. Chem. · 2020 · 412 · 750510.1007/s00216-020-02884-2 ↗
33. She · J. Microelectromechanical Syst. · 2019 · 28 · 52110.1109/JMEMS.2019.2903457 ↗
34. Pan · Electrochim. Acta · 2018 · 261 · 48210.1016/j.electacta.2017.12.163 ↗
35. Gherab · J. Mater. Res. Technol. · 2020 · 9 · 85710.1016/j.jmrt.2019.11.025 ↗
36. Tincu · Diam. Relat. Mater. · 2019 · 98 · 10751010.1016/j.diamond.2019.107510 ↗
37. Shukla · Electrochem. Commun. · 2020 · 120 · 10685010.1016/j.elecom.2020.106850 ↗
38. Zhao · Environ. Int. · 2020 · 139 · 10567210.1016/j.envint.2020.105672 ↗
39. Brownlee · ACS Appl. Nano Mater. · 2020 · 3 · 10166−1017510.1021/acsanm.0c02121 ↗
40. Martín Várguez · ACS Appl. Mater. Interfaces · 2020 · 5 · 4733-474210.1021/acsomega.9b04331 ↗
41. Ali · J. Electrochem. Soc. · 2020 · 167 · 03755010.1149/1945-7111/ab69fe ↗
42. Stefan-Van Staden · J. Electrochem. Soc. · 2014 · 161 · B167-B17010.1149/2.0011409jes ↗
43. Gugoasa · J. Electrochem. Soc. · 2017 · 164 · B44310.1149/2.1191709jes ↗
44. Stefan-Van Staden · J. Electrochem. Soc. · 2017 · 164 · B561-B56610.1149/2.1961712jes ↗
45. Stefan-van Staden · J. Electrochem. Soc. · 2019 · 166 · B18310.1149/2.0201904jes ↗
46. Gugoasa · Anal. Lett. · 2019 · 52 · 258310.1080/00032719.2019.1620262 ↗
47. Harito · J. Electrochem. Soc. · 2020 · 167 · 03756610.1149/1945-7111/ab697c ↗
48. Alam · ACS Sens. · 2020 · 5 · 41210.1021/acssensors.9b02095 ↗
49. Moussa · J. Electrochem. Soc. · 2019 · 166 · G2510.1149/2.0741906jes ↗
50. Qin · RSC Adv. · 2015 · 5 · 6908610.1039/C5RA11291E ↗
51. Benck · PLoS One · 2014 · 9 · 137110.1371/journal.pone.0107942 ↗
52. Nge · Chem. Rev. · 2013 · 113 · 255010.1021/cr300337x ↗
53. Matysik · Anal. Bioanal. · 2003 · 375 · 3310.1007/s00216-002-1635-x ↗
54. Gugoasa · J. Electrochem. Soc. · 2020 · 167 · 03750610.1149/2.0062003JES ↗
55. Zhao · J. Solid State Electrochem. · 2015 · 19 · 157110.1007/s10008-015-2774-2 ↗
56. Wang · J. Electrochem. Soc. · 2018 · 165 · B81410.1149/2.0401816jes ↗
57. Wan · Biosens. Bioelectron. · 2013 · 47 · 110.1016/j.bios.2013.02.045 ↗
58. Labadi Z. · ACS Biomater. Sci. Eng. · 2020 · 6 · 381110.1021/acsbiomaterials.0c00280 ↗
59. Brosel-Oliu · Lab Chip · 2019 · 19 · 143610.1039/C8LC01220B ↗
60. Mihailescu · Talanta · 2020 · 210 · 12064310.1016/j.talanta.2019.120643 ↗
61. Chen · Int. J. Nanomedicine · 2020 · 15 · 661910.2147/IJN.S264645 ↗
62. Robinson · Anal. Methods · 2020 · 12 · 265510.1039/D0AY00194E ↗
63. Mazaafrianto · ACS Omega · 2018 · 3 · 1682310.1021/acsomega.8b01996 ↗
64. Zhang · ACS Omega · 2020 · 5 · 2589910.1021/acsomega.0c03260 ↗
65. Dawson · J. Phys. Chem. C · 2012 · 116 · 1466510.1021/jp302967p ↗
66. Reliability design of thermally actuated MEMS switches based on V-shape beams10.1007/s00542-015-2789-8 ↗