DataVXJournal of The Electrochemical SocietyPaper
article·2011-01-01

Growth and Characterization of AlN and AlGaN Epitaxial Films on AlN Single Crystal Substrates

Rafael Dalmau, Baxter Moody, R. Schlesser, Seiji Mita, Jinqiao Xie, Martin Feneberg, Benjamin Neuschl, K. Thonke, Ramón Collazo, A. Rice, James Tweedie, Zlatko Sitar

Journal of The Electrochemical Society
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Source abstract

Abstract

AlN and AlGaN epitaxial films were deposited by metal organic chemical vapor deposition on single crystal AlN substrates processed from AlN boules grown by physical vapor transport. Structural, chemical, and optical characterization demonstrated the high crystalline quality of the films and interfaces.
Source: openalex_inverted_index · Quality: baseline

Research context

Materials processing

OpenAlex topics: GaN-based semiconductor devices and materials · ZnO doping and properties · Ga2O3 and related materials

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