Characterization of Thin-Film Lithium Batteries with Stable Thin-Film Li[sub 3]PO[sub 4] Solid Electrolytes Fabricated by ArF Excimer Laser Deposition

High quality thin films have been prepared by pulsed laser deposition (PLD) as a solid electrolyte for thin-film batteries. The structure, composition, ionic conductivity, and electrochemical stability of the thin films have been characterized. The film exhibits a single lithium-ion conductor with an ionic conductivity of at and an activation energy of 0.58 eV. The film is electrochemically stable in the potential range from 0 to 4.7 V vs . All-solid-state thin-film batteries, , have been fabricated by using PLD-grown thin film. The thin-film battery shows excellent intercalation property and stability for long-term cycling in the potential range from 3.0 to 4.4 V.