journal article·2025-08-01Open access

Melilite-type silicate single crystals for high-temperature piezoelectric applications

Hiroaki Takeda

Abstract

Melilite-type silicate single crystals have emerged as promising materials for high-temperature piezoelectric applications in devices such as accelerometers, gas sensors, gas injectors, and pressure sensors.Sr-substituted Ca2MgSi2O7 (Sr-CMS) single crystals were grown using the Czochralski (Cz) method.The Sr-CMS crystals exhibited no phase transition from room temperature to the melting temperature, with a piezoelectric d'31 constant of 2.1 pC/N and a compressive strength of 830 MPa on a (ZXt)45 rotation-cut crystal substrate.Thus, Sr-CMS single crystals are promising for high-temperature pressure sensors.Ca2Al2SiO7 (CAS) single crystals, which can also be grown using the Cz method, were investigated for high-temperature microbalance (MB) applications.They exhibit stable piezoelectric properties at high temperatures and have a lower density than langasite-type crystals.The thickness-shear vibration (d'15 mode) of the CAS crystals was characterized, with the (XYw)45-cut substrate showing the highest d'15 constant.Using this crystal substrate, an LiZrO3/Au/CAS device was configured and characterized as an MB.The device exhibited a resonance frequency shift when exposed to CO2 gas in an air atmosphere at 500 C, indicating that CAS single crystals can be used for MB applications at high temperatures.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Acoustic Wave Resonator Technologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Graduate School of Science and Engineering, Saitama University

References (78)

Show source-provided references
1. 1) A. C. Aydin and O. Çelebi, ACS Omega 8, 19168 (2023).10.1021/acsomega.3c00672 ↗
2. 2) Y. Sun, Y. Ota, H.-P. Kim, Z. Wang, T. Fujii, Y. J. Yamashita, T. Karaki and X. Jiang, Jpn. J. Appl. Phys. 61, SN1026 (2022).
3. 3) T. Nozaki, A. Martin, R. Kobayashi, T. Nakayama and K. Kakimoto, Jpn. J. Appl. Phys. 61, SN1030 (2022).10.35848/1347-4065/ac85c6 ↗
4. 4) H. Nam, I. Fujii, S. Kim, T. Ishii, S. Ueno, G. P. Khanal, Y. Kuroiwa and S. Wada, Jpn. J. Appl. Phys. 61, SN1033 (2022).10.35848/1347-4065/ac85c7 ↗
5. 5) Y. Miwa, H. Hayashi, S. Kawada and N. Tanaka, Jpn. J. Appl. Phys. 62, SM0801 (2023).10.35848/1347-4065/ace3d0 ↗
6. 6) H. Nam, I. Fujii, S. Nakagawa, S. Ueno and S. Wada, Jpn. J. Appl. Phys. 62, SM1002 (2023).10.35848/1347-4065/ace1dc ↗
7. 7) Y. Yamashita, H. Sun, Y. Xiang, H. Maiwa, H.-Y. Lee, H.-P. Kim and X. Jiang, Jpn. J. Appl. Phys. 62, SM1009 (2023).10.35848/1347-4065/ace537 ↗
8. 8) K. Echizenya and N. Noda, Jpn. J. Appl. Phys. 62, SM1023 (2023).
9. 9) Y. Xiang, Y. Sun, Y. Yamashita, T. Karaki and H. Maiwa, J. Ceram. Soc. Jpn. 131, 263 (2023).10.2109/jcersj2.22169 ↗
10. 10) X. Jiang, K. Kim, S. Zhang, J. Johnson and G. Salazar, Sensors 14, 144 (2013).10.3390/s140100144 ↗
11. 11) A. K. Nagmani and B. Behera, IEEE T. Ultrason. Ferr. 69, 918 (2022).10.1109/TUFFC.2022.3143666 ↗
12. 12) J. Millichamp, E. Ali, N. P. Brandon, R. J. C. Brown, D. Hodgson, C. Kalyvas, G. Manos and D. J. L. Brett, Ind. Eng. Chem. Res. 50, 8371 (2011).10.1021/ie200188z ↗
13. 13) Y. Suhak, H. Fritze, A. Sotnikov, H. Schmidt and W. L. Johnson, J. Appl. Phys. 130, 085102 (2021).10.1063/5.0058751 ↗
14. 14) J. Dzuba, G. Vanko, M. Držík, I. Rýger, V. Kutiš, J. Zehetner and T. Lalinský, Appl. Phys. Lett. 107, 122102 (2015).10.1063/1.4931436 ↗
15. 15) Y. Chen, Q. Xu, X. Zhang and M. Kuang, IEEE Sens. J. 23, 26910 (2023).10.1109/JSEN.2023.3323318 ↗
16. 16) S. Zhang, Y. Zheng, H. Kong, J. Xin, E. Frantz and T. R. Shrout, J. Appl. Phys. 105, 114107 (2009).10.1063/1.3142429 ↗
17. 17) M. I. Shah and T. Saha, IEEE T. Ultrason. Ferr. 69, 1461 (2022).10.1109/TUFFC.2022.3145496 ↗
18. 18) O. M. Kugaenko, S. S. Bazalevskaya, T. B. Sagalova, V. S. Petrakov, O. A. Buzanov and S. A. Saharov, Bull. Russ. Acad. Sci.: Phys. 78, 1067 (2014).10.3103/S106287381410013X ↗
19. 19) H. Usui, H. Kusakabe, M. Tokuda, K. Sugiyama, T. Hoshina, T. Tsurumi and H. Takeda, J. Ceram. Soc. Jpn. 128, 441 (2020).10.2109/jcersj2.20016 ↗
20. 20) H. Takeda, Y. Sobata, H. Usui, S. Kodama, I. Yanase, T. Hoshina, T. Tsurumi and K. Shimamura, J. Ceram. Soc. Jpn. 130, 16 (2022).10.2109/jcersj2.21116 ↗
21. 21) L. Bai, D. Liu, X. Zhao, X. Zhao, F. Yu and Y. Li, ACS Appl. Mater. Inter. 15, 3152 (2023).10.1021/acsami.2c19480 ↗
22. 22) Y. Yokota, Y. Ohashi, T. Horiai and A. Yoshikawa, Mater. Today Commun. 37, 107506 (2023).10.1016/j.mtcomm.2023.107506 ↗
23. 23) F. Yu, S. Zhang, X. Zhao, D. Yuan, L. Qin, Q. M. Wang and T. R. Shrout, IEEE T. Ultrason. Ferr. 58, 868 (2011).10.1109/TUFFC.2011.1881 ↗
24. 24) S. Tian, L. Li, X. Li, F. Yu, Y. Li, C. Jiang, X. Duan, Z. Wang, S. Zhang and X. Zhao, Acta Mater. 183, 165 (2020).10.1016/j.actamat.2019.11.013 ↗
25. 25) M. Münchhalfen, J. Schreuer, C. Reuther, E. Mehner and H. Stöcker, J. Appl. Phys. 130, 095102 (2021).10.1063/5.0061747 ↗
26. 26) K. Xiong, X. Tu, Z. Man, S. Wang, Y. Zheng, T. Karaki and E. Shi, CrystEngComm 24, 4294 (2022).10.1039/D2CE00259K ↗
27. 27) P. Krempl, G. Schleinzer and W. Wallnöfer, Sensor. Actuat. A-Phys. 61, 361 (1997).10.1016/S0924-4247(97)80289-0 ↗
28. 28) J. Haines, O. Cambon, N. Prudhomme, G. Fraysse, D. A. Keen, L. C. Chapon and M. G. Tucker, Phys. Rev. B 73, 014103 (2006).10.1103/PhysRevB.73.014103 ↗
29. 29) M. Akiyama, T. Kamohara, K. Kano, A. Teshigahara, Y. Takeuchi and N. Kawahara, Adv. Mater. 21, 593 (2009).10.1002/adma.200802611 ↗
30. 30) M. Bickermann, B. M. Epelbaum, O. Filip, B. Tautz, P. Heimann and A. Winnacker, Phys. Status Solidi C 9, 449 (2012).10.1002/pssc.201100345 ↗
31. 31) R. R. Sumathi, CrystEngComm 15, 2232 (2013).10.1039/C2CE26599K ↗
32. 32) Z. Yang, F. Wang, W. Nie, X. Han, X. Guo, X. Shan, X. Lin, H. Dun, Z. Sun, Y. Xie and K. Zhang, Sensor. Actuat. A-Phys. 357, 114379 (2023).10.1016/j.sna.2023.114379 ↗
33. 33) N.-I. Kim, M. Yarali, M. Moradnia, M. Aqib, C.-H. Liao, F. AlQatari, M. Nong, X. Li and J.-H. Ryou, Adv. Funct. Mater. 33, 2212538 (2023).
34. 34) K. Hirata, K. Niitsu, S. A. Anggraini, T. Kageura, M. Uehara, H. Yamada and M. Akiyama, Mater. Today 83, 85 (2025).10.1016/j.mattod.2024.12.011 ↗
35. 35) H. Lu, X. Hao, L. Yang, B. Hou, M. Zhang, M. Wu, J. Dong and X. Ma, Micromachines-Basel 16, 205 (2025).10.3390/mi16020205 ↗
36. 36) Citizen Finedevice Co., Ltd., Langasite-type single crystals for combustion pressure sensor, https://cfd.citizen.co.jp/sensor/development [in Japanese].
37. 37) C. Shen, H. Zhang, H. Cong, H. Yu, J. Wang and S. Zhang, J. Appl. Phys. 116, 044106 (2014).10.1063/1.4891827 ↗
38. 38) C. Jiang, X. Liu, F. Yu, S. Zang, H. Fang, X. Cheng and X. Zhao, IEEE T. Ind. Electron. 68, 12850 (2021).10.1109/TIE.2020.3044792 ↗
39. 39) Z. Gao, X. Tian, J. Zhang, Q. Wu, Q. Lu and X. Tao, Cryst. Growth Des. 15, 759763 (2015).
40. 40) Y. Kitanaka, Y. Noguchi, M. Miyayama and Y. Kagawa, Jpn. J. Appl. Phys. 51, 09LD08 (2012).10.1143/JJAP.51.09LD08 ↗
41. 41) F. Chen, L. Kong, F. Yu, C. Wang, Q. Lu, S. Zhang, Y. Li, X. Duan, L. Qin and X. Zhao, CrystEngComm 19, 546551 (2017).10.1039/C6CE02289H ↗
42. 42) M. Xu, Z. Ma, G. Wang, X. Peng, Z. Liu, W. Liu, X. Zhao and F. Yu, CrystEngComm 26, 1556 (2024).10.1039/D3CE01317K ↗
43. 43) L. Xie, S. Hou, F. Yu and X. Zhao, CrystEngComm 24, 8117 (2022).10.1039/D2CE01286C ↗
44. 44) H. Takeda, M. Hagiwara, H. Noguchi, T. Hoshina, T. Takahashi, N. Kodama and T. Tsurumi, Appl. Phys. Lett. 102, 242907 (2013).10.1063/1.4811163 ↗
45. 45) C. Shen, Y. Zhang, H. Yu, S. Zhang, W. Cao, J. Wang and H. Zhang, J. Alloy. Compd. 647, 10691074 (2015).
46. 46) M. Merlini, M. Gemmi, G. Cruciani and G. Artioli, Phys. Chem. Miner. 35, 147 (2008).10.1007/s00269-007-0206-2 ↗
47. 47) M. Hamada and M. Akasaka, Phys. Chem. Miner. 40, 259 (2013).10.1007/s00269-013-0566-8 ↗
48. 48) M. Hagiwara, H. Noguchi, T. Hoshina, H. Takeda, S. Fujihara, N. Kodama and T. Tsurumi, Jpn. J. Appl. Phys. 52, 09KD03 (2013).10.7567/JJAP.52.09KD03 ↗
49. 49) H. Takeda, K. Yoshida, H. Okudera, K. Lebbou, T. Hoshina and T. Tsurumi, J. Ceram. Soc. Jpn. 125, 23 (2017).10.2109/jcersj2.16206 ↗
50. 50) T. Oshima, T. Hoshina, T. Tsurumi, K. Lebbou and H. Takeda, J. Ceram. Soc. Jpn. 126, 300 (2018).10.2109/jcersj2.17263 ↗
51. 51) H. Takeda, K. Akimoto, T. Oshima, K. Takizawa, J. Kondoh, A. Matsutani, T. Hoshina and T. Tsurumi, Jpn. J. Appl. Phys. 57, 11UD01 (2018).10.7567/JJAP.57.11UD01 ↗
52. 52) H. Takeda, H. Kusakabe, H. Usui, T. Hoshina, T. Tsurumi and K. Lebbou, J. Ceram. Soc. Jpn. 128, 130 (2020).10.2109/jcersj2.19193 ↗
53. 53) H. Takeda, T. Uehara, G. Hirano, S. Kodama, I. Yanase and K. Sugiyama, Jpn. J. Appl. Phys. 62, SM1027 (2023).10.35848/1347-4065/acf2a5 ↗
54. 54) K. Lebbou and G. Boulon, in “Fiber Crystal Growth from the Melt, Advances in Materials Research”, Ed. by T. Fukuda, P. Rudolph and S. Uda, Springer-Verlag, Berlin (2004) pp. 219–254.10.1007/978-3-662-07214-1_7 ↗
55. 55) IEEE Standard on Piezoelectricity 176-1987 (1987).
56. 56) E. P. Eernisse and R. W. Ward, Proc. Freq. Control Symp. 254 (1991).
57. 57) H. Yang, R. M. Hazen, R. T. Downs and L. W. Finger, Phys. Chem. Miner. 24, 510 (1997).10.1007/s002690050066 ↗
58. 58) M. Gemmi, M. Merlini, G. Cruciani and G. Artioli, Am. Mineral. 92, 1685 (2007).10.2138/am.2007.2380 ↗
59. 59) A. Matteo, C. Giuseppe and D. Michele, Phys. Chem. Miner. 39, 713 (2012).
60. 60) M. Kimata, Z. Kristallogr. 163, 295 (1983).10.1524/zkri.1983.163.3-4.295 ↗
61. 61) A. A. Kaminskii, E. L. Belokoneva, B. V. Mill, S. E. Sarkisov and K. Kurbanov, Phys. Status Solidi A 97, 279 (1986).10.1002/pssa.2210970127 ↗
62. 62) P. Becker, P. Held, J. Liebertz and L. Bohaty, Cryst. Res. Technol. 44, 603 (2009).
63. 63) A. A. Kaminskii, L. Bohaty, P. Becker, J. Liebertz, P. Held, H. J. Eichler, H. Rhee and J. Hanuza, Laser Phys. Lett. 5, 845 (2008).10.1002/lapl.200810089 ↗
64. 64) J. M. S. Skakle and R. Herd, Powder Diffr. 14, 195 (1999).10.1017/S0885715600010526 ↗
65. 65) J. Hanuza, K. Hermanowicz, M. Maczka, W. Ryba-Romanowski, T. Lis and M. Berkowski, J. Raman Spectrosc. 26, 255 (1995).10.1002/jrs.1250260402 ↗
66. 66) L. Bohaty and J. Liebertz, Z. Kristallogr. 159, 277 (1982).10.1524/zkri.1982.159.14.277 ↗
67. 67) S. Haussühl and J. Liebertz, Phys. Chem. Miner. 31, 565 (2004).10.1007/s00269-004-0416-9 ↗
68. 68) C. Shen, S. Zhang, W. Cao, J. Wang, H. Cong, H. Yu and H. Zhang, J. Appl. Phys. 117, 064106 (2015).10.1063/1.4908113 ↗
69. 69) C. Shen, S. Zhang, D. Wang, T. Xu, W. Cao, J. Wang, H. Yu and H. Zhang, CrystEngComm 17, 1791 (2015).10.1039/C4CE02015D ↗
70. 70) C. B. Finch, G. W. Clark, L. A. Harris and C. S. Yust, J. Cryst. Growth 23, 295 (1974).10.1016/0022-0248(74)90072-4 ↗
71. 71) B. S. Hemingway, H. T. Evans, G. L. Nord, H. T. Haselton, R. A. Robie and J. J. McGee, Can. Mineral. 24, 425 (1986).
72. 72) H. Rager, M. Schosnig, A. K. Schaper, A. Kutoglu and W. Treutmann, Z. Kristallogr. 215, 495 (2000).10.1524/zkri.2000.215.9.495 ↗
73. 73) I. Takahashi, T. Aoki, Y. Nonogaki and Y. Kinoshita, Japan Patent, WO2017030166 (2017).
74. 74) K. Tsukada, M. Takeuchi, S. Tokumitsu, Y. Ohmura and K. Kawaguchi, R&D Review of Toyota CRDL 28, 49 (1993) [in Japanese].
75. 75) H. Fritze, Meas. Sci. Technol. 22, 12002 (2011).10.1088/0957-0233/22/1/012002 ↗
76. 76) W. P. Maison, US Patent, 2484635.
77. 77) R. D. Mindlin, Int. J. Solids Struct. 1, 141 (1965).10.1016/0020-7683(65)90022-3 ↗
78. 78) W. H. Baur, Acta Crystallogr. B 30, 1195 (1974).10.1107/S0567740874004560 ↗