journal article·2011-08

Multi-directional self-ion irradiation of thin gold films: A new strategy for achieving full texture control

Matteo Seita, Daniel Muff, Ralph Spolenak

Acta Materialia· Volume 59· Issue 13
Publisher page

Abstract

Abstract Post-deposition ion bombardment can be employed to convert polycrystalline films into single crystals through a process of selective grain growth. Here we report a new technique that enables selective grain growth in self-ion bombarded gold films – a system in which the formation of large single crystal domains was prevented by the occurrence of ion-induced texture rotation. Our findings suggest that the extent of the texture rotation is a function of the ion fluence and the film initial microstructure.
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Research context

OpenAlex topics: Ion-surface interactions and analysis · Semiconductor materials and devices · Copper Interconnects and Reliability

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