journal article·2018-01Open access

In situ dynamic TEM characterization of unsteady crystallization during laser processing of amorphous germanium

Garth C. Egan, Tian T. Li, John D. Roehling, Joseph T. McKeown, Geoffrey H. Campbell

Acta Materialia· Volume 143

Abstract

Abstract The unsteady propagation mechanism for the crystallization of amorphous germanium (a-Ge) was studied with in situ movie-mode dynamic transmission electron microscopy (MM-DTEM). Short laser pulses were used to heat sputter-deposited a-Ge films and the resulting crystallization process was imaged with up to 16 sequential 50 ns long electron pulses separated by a controlled delay that was varied between 0.5 and 5 μs The unsteady crystallization in the radial, net-growth direction was observed to occur at a decreasing rate of ∼1.5–0.2 m/s through a mechanism involving the formation of discrete ∼1.1 μm wide bands that grew with velocities of 9–12 m/s perpendicular to the radial direction and along the perimeter of the crystallized area. The crystallization rate and resulting microstructure were consistent with a liquid-mediated growth mechanism, which suggests that locally the band front reaches the amorphous melting temperature of Ge. A mechanism based on the notion of a critical temperature is proposed to explain the unsteady, banded behavior.
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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Ion-surface interactions and analysis · Laser Material Processing Techniques

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