journal article·2005-11

Pinch-off maps for the design of morphologically stable multilayer thin films with immiscible phases

Jue Wang, Peter M. Anderson

Acta Materialia· Volume 53· Issue 19
Publisher page

Abstract

Abstract Design maps are developed for the time to pinch-off via grain boundary grooving in multilayer thin films consisting of two immiscible phases. Variables include the (isotropic) interfacial/grain boundary energies, interfacial diffusivities, initial grain aspect ratio, and imposed in-plane strain rate. The maps are based on a new 2D analysis of grooving in multilayer thin films that extends earlier work by Thouless [Thouless MD. Acta Metall Mater 1993;41:1057] for single phase films. A modified Mullins [Mullins WW, J Appl Phys 1957;28:333] parameter B ∼ multi and time scale τmulti are found to control grooving kinetics, with initial groove depth scaling as t1/4, t3/4, or t, depending on the magnitude of in-plane strain rate and geometry. The maps predict that nano-scale films may or may not be more unstable to pinch-off at elevated temperature compared to micro-scale counterparts, depending on morphology, interfacial/grain boundary energies, and in-plane strain rate.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Fluid Dynamics and Thin Films · Metal and Thin Film Mechanics · Copper Interconnects and Reliability

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (32)

Show source-provided references
1. Implications and applications of zero creep experiments for the stability of multilayer structures
2. Josell · Nanostruct Mater · 1999 · 12 · 38710.1016/S0965-9773(99)00141-5 ↗
3. Fain · 2000 · vol. 581
4. Sperling · J Mater Res · 2004 · 19 · 337410.1557/JMR.2004.0435 ↗
5. Lewis · Scr Mater · 2003 · 48 · 107910.1016/S1359-6462(02)00629-2 ↗
6. Josell · 1992 · vol. 239
7. Misra · 1992 · vol. 695
8. Misra · Philos Mag · 2002 · 84 · 102110.1080/14786430310001659480 ↗
9. Frost · Acta Metall · 1990 · 38 · 145510.1016/0956-7151(90)90114-V ↗
10. Mullins · Acta Metall · 1958 · 6 · 41410.1016/0001-6160(58)90020-8 ↗
11. Gao · Acta Mater · 1999 · 47 · 286510.1016/S1359-6454(99)00178-0 ↗
12. Mullins · J Appl Phys · 1957 · 28 · 33310.1063/1.1722742 ↗
13. Mullins · Trans AIME · 1960 · 218 · 354
14. Mullins · Interf Sci · 2001 · 9 · 910.1023/A:1011258510496 ↗
15. Mullins · Acta Metall · 1959 · 7 · 16310.1016/0001-6160(59)90069-0 ↗
16. Knoedler · Metall Mater Trans A · 2003 · 34A · 104310.1007/s11661-003-0125-x ↗
17. Lee · Eur Phys J Appl Phys · 1999 · 8 · 19710.1051/epjap:1999247 ↗
18. Robertson · J Appl Phys · 1971 · 42 · 46310.1063/1.1659625 ↗
19. Zhang · Comput Mater Sci · 1995 · 3 · 34710.1016/0927-0256(94)00073-L ↗
20. Klinger · Acta Mater · 2002 · 50 · 338510.1016/S1359-6454(02)00141-6 ↗
21. Klinger · Interf Sci · 2001 · 9 · 5510.1023/A:1011270830969 ↗
22. Thouless · Acta Metall Mater · 1993 · 41 · 105710.1016/0956-7151(93)90155-L ↗
23. Génin · Acta Mater · 1993 · 41 · 334110.1016/0956-7151(93)90215-E ↗
24. Génin · Interf Sci · 2001 · 9 · 8310.1023/A:1011231131878 ↗
25. Gangulee · Thin Solid Films · 1974 · 24 · 27310.1016/0040-6090(74)90172-2 ↗
26. Srolovitz · J Appl Phys · 1986 · 60 · 24710.1063/1.337689 ↗
27. Génin · Acta Metall Mater · 1992 · 40 · 323910.1016/0956-7151(92)90037-F ↗
28. Josell · Mater Res Soc Bull · 1999 · 24 · 3910.1557/S0883769400051538 ↗
29. Rabkin · Mater Sci Eng A · 1998 · A249 · 19010.1016/S0921-5093(98)00610-8 ↗
30. Klinger · J Appl Phys · 1996 · 79 · 683410.1063/1.361505 ↗
31. Bailey · Proc Phys Soc · 1950 · B63 · 35010.1088/0370-1301/63/5/306 ↗
32. Chuang · Acta Metall · 1979 · 27 · 26510.1016/0001-6160(79)90021-X ↗